John Sporre

Title: John Sporre and Gray-Tone Resist Technology.

Introduction

John Sporre is an inventor based in Bothell, Washington, and works at Meta Platforms Technologies, LLC. His patent work concerns gray-tone photoresists and processes for fabricating surface-relief gratings.

Latest Patents

Sporre is associated with 1 patent, titled “Gray-tone resists and processes.” The patent describes techniques for producing straight or slanted surface-relief gratings with uniform or non-uniform depth. In certain embodiments, the gray-tone photoresist combines novolac resin, a diazonaphthoquinone dissolution inhibitor, and crosslinking agents. After exposure and development, baking at an elevated temperature crosslinks the resist, increasing its density and glass transition temperature. These properties can help prevent the resist from becoming flowable during etching, reducing ripples and other surface roughness.

Career Highlights

Sporre’s disclosed invention addresses material stability during the fabrication of surface-relief gratings. By modifying the photoresist through crosslinking, the process aims to support more controlled etching and improved surface quality.

Collaborations

Sporre’s listed coworkers include Keren Zhang and Xu Zhang. The patent information provided does not specify their individual contributions.

Conclusion

John Sporre’s patent focuses on crosslinked gray-tone photoresists as a way to improve stability and surface quality when fabricating surface-relief gratings.