Johan Swerts

Title: Innovations of Johan Swerts in Remote Plasma Activated Nitridation

Introduction

Johan Swerts is a notable inventor based in Kessel-lo, Belgium. He has made significant contributions to the field of materials science, particularly in the area of nitridation processes. His innovative approach has led to the development of a unique patent that enhances the formation of nitrogen-containing layers.

Latest Patents

Johan Swerts holds a patent for a process titled "Remote Plasma Activated Nitridation." This invention utilizes a nitrogen precursor that is activated by exposure to remotely excited species, such as nitrogen (N), argon (Ar), and helium (He), which are excited in a microwave radical generator. The process involves mixing the flow of excited species with a flow of ammonia (NH) before exposing the substrate to both activated NH and the excited species. This method allows for higher levels of nitrogen incorporation compared to traditional plasma nitridation or thermal nitridation, all while maintaining the same process temperatures and durations. His innovative approach has the potential to significantly improve the efficiency of chemical vapor deposition processes.

Career Highlights

Johan Swerts is currently employed at Asm America, Inc., where he continues to advance his research and development efforts. His work has been instrumental in pushing the boundaries of nitridation technology, making it more effective and versatile for various applications.

Collaborations

Johan has collaborated with esteemed colleagues, including Hilde De Witte and Jan Willem Maes. Their combined expertise has fostered a productive environment for innovation and development in their field.

Conclusion

Johan Swerts is a pioneering inventor whose work in remote plasma activated nitridation represents a significant advancement in materials science. His contributions are poised to impact various industries by enhancing the efficiency of nitrogen incorporation processes.