Location History:
- Dresden, DE (2002)
- Bremen, DE (2004)
Company Filing History:
Years Active: 2002-2004
Title: Joerg Dreybrodt: Innovator in Polysilicon Layer Technology
Introduction
Joerg Dreybrodt is a notable inventor based in Bremen, Germany. He has made significant contributions to the field of semiconductor technology, particularly in the development of polysilicon layers and structures. With a total of 2 patents, his work has advanced the methods used in the production and structuring of these materials.
Latest Patents
Dreybrodt's latest patents include a CVD method for producing in situ-doped polysilicon layers and polysilicon layered structures. This innovative method allows for the production of doped polysilicon layers, where the doping compound is introduced as a process gas during chemical vapor deposition. This technique defines the doping profile effectively. The process also involves stopping the feed of dopant towards the end of vapor deposition, resulting in a boundary layer of undoped silicon. This boundary layer enhances surface quality and improves adhesion to adjacent layers. Additionally, the structuring process employs a three-step etching method using fluorine, chlorine, and bromine-containing gases, which further refines the polysilicon layers and structures. The invention also includes wafers and semiconductor chips produced using this novel doping and structuring method.
Career Highlights
Joerg Dreybrodt is currently associated with Infineon Technologies AG, a leading company in semiconductor solutions. His work at Infineon has been pivotal in advancing the technology surrounding polysilicon layers, contributing to the company's reputation for innovation in the semiconductor industry.
Collaborations
Dreybrodt has collaborated with notable colleagues such as Dirk Drescher and Ralf Zedlitz. These collaborations have fostered a productive environment for innovation and development in their field.
Conclusion
Joerg Dreybrodt's contributions to polysilicon layer technology exemplify the impact of innovative thinking in the semiconductor industry. His patents and work at Infineon Technologies AG continue to influence advancements in this critical area of technology.