This inventor holds 1 USPTO granted patent. Top assignee: Advanced Semiconductor Materials, Inc.. Active years: 1992.
Company Filing History:
Years Active: 1992
Title: Innovations of Joe R Smith in Semiconductor Processing
Introduction
Joe R Smith is a notable inventor based in Tempe, AZ (US), recognized for his contributions to the field of semiconductor processing. With a focus on enhancing production efficiency, Smith has developed innovative methods that significantly impact the industry.
Latest Patents
Smith holds a patent for a "Method for processing wafers in a multi-station common chamber reactor." This invention involves a system where a plurality of individually heated circularly located susceptors supports and heats multiple wafers within a processing chamber. An overhead gas dispersion head, aligned with each susceptor, directs a reactant gas uniformly across the supported wafer. The design includes a spider that sequentially relocates each wafer to an adjacent susceptor, ensuring a high production rate throughput. Additionally, a source of RF energy radiates primarily between each gas dispersion head and its associated susceptor, creating a plasma-enhanced environment while minimizing residual deposits within the reactor.
Career Highlights
Joe R Smith is associated with Advanced Semiconductor Materials, Inc., where he applies his expertise in semiconductor technology. His work has contributed to advancements in wafer processing techniques, making significant strides in the efficiency and effectiveness of semiconductor manufacturing.
Collaborations
Smith has collaborated with notable colleagues, including H Peter Hey and William A Mazak, who share a commitment to innovation in semiconductor technologies.
Conclusion
Joe R Smith's innovative methods in semiconductor processing exemplify the importance of advancements in technology. His contributions continue to influence the industry, showcasing the potential for improved production techniques.