Company Filing History:
Years Active: 2020-2025
Title: Joachim Kalden: Innovator in EUV Lithography
Introduction
Joachim Kalden is a prominent inventor based in Essingen, Germany. He has made significant contributions to the field of optical systems, particularly in extreme ultraviolet (EUV) lithography. With a total of 2 patents, Kalden's work has advanced the technology used in semiconductor manufacturing.
Latest Patents
Kalden's latest patents include an "Illumination optical system for EUV projection lithography." This invention features an illumination optical unit that incorporates a field facet mirror with multiple facets to guide illumination light into an object field where a lithography mask can be arranged. The design includes a spectral output coupling mirror section that outputs a spectral analysis partial beam from the illumination light's beam path. A detector is utilized for the spectral analysis of this partial beam, enhancing process monitoring during projection exposure.
Another notable patent is the "Method for correcting a reflective optical element for the wavelength range between 5 nm and 20 nm." This method involves a multilayer system on a substrate, consisting of layers made from at least two different materials with varying refractive indices. The process includes measuring the reflectivity distribution across the multilayer system's surface and comparing it to a nominal distribution. This allows for the identification of partial surfaces with higher reflectivity, which can then be irradiated with ions or electrons for correction.
Career Highlights
Kalden is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and lithography equipment. His work at this esteemed organization has positioned him as a key player in the development of advanced lithographic technologies.
Collaborations
Kalden collaborates with various professionals in his field, including his coworker Stig Bieling. Their combined expertise contributes to the innovative advancements in optical systems.
Conclusion
Joachim Kalden's contributions to EUV lithography through his patents and work at Carl Zeiss SMT GmbH highlight his role as a significant inventor in the field. His innovative approaches continue to shape the future of semiconductor manufacturing.