Jiqiang Li

Title: Innovations by Jiqiang Li in Wafer Measurement Technologies

Introduction

Jiqiang Li is a notable inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor technology, particularly in methods for wafer measurement. His innovative approaches have led to advancements in characterizing cross-wafer variations, which are crucial for improving manufacturing processes in the semiconductor industry.

Latest Patents

Jiqiang Li holds a patent titled "Methods and systems for selecting wafer locations to characterize cross-wafer variations based on high-throughput measurement signals." This patent describes methods and systems for selecting measurement locations on a wafer for subsequent detailed measurements. High throughput measurements are performed at a relatively large number of measurement sites on a wafer. The measurement signals are transformed to a new mathematical basis and reduced to a significantly smaller dimension in the new basis. A set of representative measurement sites is selected based on analyzing the variation of the high throughput measurement signals. In some embodiments, the spectra are subdivided into a set of different groups. The spectra are grouped together to minimize variance within each group. Furthermore, a die location is selected that is representative of the variance exhibited by the die in each group. A spectrum of a measurement site and corresponding wafer location is selected to correspond most closely to the center point of each cluster.

Career Highlights

Throughout his career, Jiqiang Li has worked with prominent companies in the semiconductor industry. He has been associated with Kla Corporation and Xpt Eds (Hefei) Co., Ltd., where he has contributed to various projects that enhance wafer measurement technologies. His work has been instrumental in developing efficient methods for analyzing semiconductor wafers.

Collaborations

Jiqiang Li has collaborated with several professionals in his field, including Brian C Lin and Song Qing Wu. These collaborations have fostered innovation and have led to the development of advanced technologies in wafer measurement.

Conclusion

Jiqiang Li's contributions to wafer measurement technologies have significantly impacted the semiconductor industry. His innovative patent and collaborations with industry professionals highlight his role as a key inventor in this field.