Jinlong Zhu

Title: Jinlong Zhu: Innovator in Semiconductor Technology

Introduction

Jinlong Zhu is a prominent inventor based in Wuhan, China. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to complex refractive index distribution and critical dimension extraction in semiconductor nanostructures.

Latest Patents

One of his latest patents is titled "Method, device and computer-readable storage medium for obtaining complex refractive index distribution profile of film." This invention discloses a method for obtaining the complex refractive index distribution profile of a film. The process involves collecting the interference image of the reference area and the sample under test. It also includes determining the normalized light intensity map and the optical path difference of the sample relative to the reference area through a recovery algorithm based on the obtained interference image. Furthermore, a measurement model is established based on the reflective film transmission matrix model, allowing for the calculation of the complex refractive index distribution profile of the film under test.

Another notable patent is the "Method for extracting critical dimension of semiconductor nanostructure." This method includes determining a value range for each parameter to be extracted, generating an electronic spectra database, and employing training spectra and support vector machine (SVM) training networks for SVM training. After training, the SVMs are used to map measured spectra to yield a corresponding electronic spectra database. Finally, a searching algorithm is employed to find an optimum simulation spectrum in the electronic spectra database, with simulation parameters corresponding to the critical dimension of the semiconductor nanostructure to be extracted.

Career Highlights

Jinlong Zhu is affiliated with Huazhong University of Science and Technology, where he continues to advance research in semiconductor technologies. His work has garnered attention for its practical applications and innovative methodologies.

Collaborations

He has collaborated with notable colleagues, including Zhe Yu and Wenyu Chen, contributing to the advancement of research in his field.

Conclusion

Jinlong Zhu's contributions to semiconductor technology through his patents and research at Huazhong University of Science and Technology highlight his role as an influential inventor. His innovative methods for analyzing complex refractive indices and extracting critical dimensions are paving the way for advancements in the semiconductor industry.