Jinji Xu

Title: Jinji Xu: Innovator in Plasma Processing Technology

Introduction

Jinji Xu is a prominent inventor based in Beijing, China. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His work focuses on innovative coil structures that enhance semiconductor processing equipment.

Latest Patents

Jinji Xu's latest patents include a "Coil structure and plasma processing apparatus" and a "Coil structure for generating plasma and semiconductor equipment." The first patent describes a coil structure that consists of a coil set with a first and second coil, designed to create an annular area. This design allows for improved electrical connections and symmetrical projections, enhancing the efficiency of plasma generation. The second patent presents a coil structure that includes coaxially arranged sub-coil sets, which are designed to compensate for current distribution differences in semiconductor processing. This innovation aims to optimize the performance of plasma generation in semiconductor equipment.

Career Highlights

Jinji Xu is currently employed at Beijing Naura Microelectronics Equipment Co., Ltd. His work at this company has positioned him as a key player in the development of advanced microelectronics technologies. His expertise in coil structures has contributed to the company's reputation for innovation in the semiconductor industry.

Collaborations

Jinji Xu has collaborated with notable colleagues, including Jinrong Zhao and Song Wang. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.

Conclusion

Jinji Xu's contributions to plasma processing technology through his innovative patents and collaborations highlight his role as a leading inventor in the field. His work continues to influence the development of semiconductor processing equipment, showcasing the importance of innovation in technology.