Jinguo Zheng

Title: Jinguo Zheng: Innovator in Electrostatic Chuck Technology

Introduction

Jinguo Zheng is a prominent inventor based in Beijing, China. He is known for his significant contributions to the field of microelectronics, particularly in the development of electrostatic chuck technology. His innovative work has led to advancements that enhance the efficiency and reliability of semiconductor manufacturing processes.

Latest Patents

Jinguo Zheng holds a patent for an electrostatic chuck and a method for manufacturing protrusions thereof. The patent describes an electrostatic chuck (ESC) that includes a support surface for carrying a workpiece, along with a plurality of protrusions distributed at intervals on the support surface. These protrusions are formed from hydrogen-free amorphous carbon, which exhibits a resistivity ranging from 10Ω·cm to 10Ω·cm. This design ensures high hardness and good wear resistance, effectively preventing particle generation that could negatively impact semiconductor processes. The innovation addresses the challenges of high-temperature environments, ensuring that the protrusions remain intact and functional even above 250°C.

Career Highlights

Jinguo Zheng is currently employed at Beijing Naura Microelectronics Equipment Co., Ltd. His role at the company allows him to apply his expertise in electrostatic chuck technology, contributing to the advancement of microelectronic equipment. His work has been instrumental in improving the performance and reliability of semiconductor manufacturing tools.

Collaborations

Jinguo Zheng collaborates with notable colleagues, including Hua Ye and Quanyu Shi. Their combined efforts in research and development have fostered a productive environment that encourages innovation and technological advancement.

Conclusion

Jinguo Zheng's contributions to electrostatic chuck technology exemplify the importance of innovation in the semiconductor industry. His patented work not only enhances manufacturing processes but also addresses critical challenges in high-temperature environments. Through his career at Beijing Naura Microelectronics Equipment Co., Ltd., Zheng continues to make significant strides in the field of microelectronics.