Beijing Naura Microelectronics Equipment Co., Ltd.

Jinguo Zheng

Hougong Wang

Quanyu Shi

Hua Ye

The present disclosure provides an electrostatic chuck (ESC) and a method for manufacturing the plurality of protrusions of the ESC. The electrostatic chuck includes a support surface for carrying a workpiece and the plurality of protrusions distributed at intervals on the support surface. The protrusions are formed by a hydrogen-free amorphous carbon with a resistivity ranging from 10&#x3a9;&#xb7;cm&#x2dc;10&#x3a9;&#xb7;cm. For the ESC provided by the present disclosure, the protrusions are formed by the hydrogen-free amorphous carbon and have a high hardness and a good wear resistance, which may effectively prevent a generation of particles. As such, the negative impact of the particles on the semiconductor process may be avoided, and the hydrogen does not dissociate in a high-temperature environment. Thereby, a problem that the protrusions may easily fall off and may not be suitable in the high-temperature environment (above 250&#xb0; C.) may be solved.

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Beijing, China

Jinguo Zheng