Jingru Sun

Title: Jingru Sun: Innovator in Film Deposition Technology

Introduction

Jingru Sun is a notable inventor based in San Jose, California. She has made significant contributions to the field of film deposition technology, particularly with her innovative patent that addresses challenges in the manufacturing process.

Latest Patents

Jingru Sun holds a patent for a "Film deposition apparatus with low plasma damage and low processing temperature." This deposition system features a magnetron sputter deposition source that includes a backing frame with a window and a closed loop around the window. The design incorporates inside surfaces towards the window, one or more sputtering targets mounted on these surfaces, and magnets on the outside surfaces of the backing frame. The sputtering targets have surfaces that define the internal walls of the window, while the magnets generate a magnetic field near the sputtering surfaces. A substrate with a deposition surface oriented towards the window receives sputtering materials from the targets.

Career Highlights

Jingru Sun is currently employed at Areesys Technologies, Inc., where she continues to develop and refine her innovative technologies. Her work has been instrumental in advancing the capabilities of film deposition systems, making them more efficient and effective.

Collaborations

Some of her coworkers include Kai-An Wang and Craig W Marion, who contribute to the collaborative environment at Areesys Technologies, Inc. Their combined expertise fosters innovation and drives the development of cutting-edge technologies.

Conclusion

Jingru Sun's contributions to film deposition technology exemplify her commitment to innovation and excellence in her field. Her patent reflects a significant advancement that could impact various applications in manufacturing processes.