Jingang Su

Title: Innovator Jingang Su: Pioneering Advances in Semiconductor Technology

Introduction: Jingang Su, an innovative inventor based in Sunnyvale, California, has made significant contributions to the field of semiconductor technology. With a total of four patents to his name, his work is highly regarded for its technical complexity and practical applications, particularly in enhancing electromigration properties in electronic devices.

Latest Patents: Among his most recent inventions, Jingang Su has developed a patent focused on the "Tailoring of a wetting/barrier layer to reduce electromigration in an aluminum interconnect." This invention involves specific wetting layer structures that enable the deposition of aluminum interconnect layers with exceptional electromigration properties. The aluminum interconnect layers exhibit a Rocking Curve Full Width at Half Maximum (FWHM) angle of about 1° or less, leading to improved reliability and performance in electronic applications.

Another notable patent pertains to the “Cleaning contact with successive fluorine and hydrogen plasmas.” This method outlines an efficient two-step process for cleaning semiconductor or metal regions on electronic device substrates. The process begins with exposing the substrate to a fluorine-containing plasma, followed by a hydrogen-based atmosphere that effectively scavenges fluorine residues. This innovative cleaning method not only enhances the electrical resistance between contact areas but also reduces the required anneal temperature, further optimizing the fabrication process of electronic devices.

Career Highlights: Jingang Su is currently associated with Applied Materials, Inc., a leading company in the semiconductor equipment sector. His expertise in semiconductor processing has positioned him as a key driver of innovation within the organization. With multiple patents under his belt, he continues to be recognized for his contributions that bridge the gap between theoretical research and practical application in semiconductor technology.

Collaborations: Throughout his career, Jingang has worked alongside notable colleagues such as Barney M. Cohen and Kenny King-Tai Ngan. Their collective efforts in research and development have propelled advancements in semiconductor processes, showcasing the importance of collaboration in the field of innovation.

Conclusion: Jingang Su stands out as a dedicated inventor whose contributions have significantly advanced semiconductor technology. His patents reflect a deep understanding of the intricacies involved in electronic device manufacturing, benefiting the industry as a whole. As he continues his work at Applied Materials, Inc., the innovations he fosters promise to drive future advancements in this critical field.