This inventor holds 2 USPTO granted patents and 1 EPO patent. Top assignee: Applied Materials, Inc.. Active years: 2003-2005.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Foster City, CA (US) (2003)
- Sunnyvale, CA (US) (2005)
Company Filing History:
Years Active: 2003-2005
Title: Innovations of Jing-Pei Chou in Semiconductor Technology
Introduction
Jing-Pei Chou is a notable inventor based in Sunnyvale, California, recognized for her contributions to semiconductor technology. With a total of two patents to her name, she has made significant advancements in the field, particularly in methods related to chemical vapor deposition and aluminum line formation.
Latest Patents
One of her latest patents is titled "Method of TiSiN deposition using a chemical vapor deposition (CVD) process." This patent describes a method for forming a titanium silicide nitride (TiSiN) layer on a substrate. The process involves treating the substrate with a silicon-containing gas, leading to the formation of a titanium nitride layer that reacts with the gas to create the TiSiN layer. This innovation is compatible with integrated circuit fabrication processes, where the TiSiN layer can serve as a diffusion barrier for tungsten metallization.
Another significant patent is the "Method for forming aluminum lines over aluminum-filled vias in a semiconductor substrate." This method addresses misalignment issues between filled vias and aluminum lines by alternately depositing liner-barrier layers and aluminum layers. The use of different etch chemistries allows for the anisotropic etching of aluminum layers without damaging the aluminum-filled vias.
Career Highlights
Jing-Pei Chou is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. Her work focuses on developing innovative solutions that enhance the efficiency and reliability of semiconductor devices.
Collaborations
Throughout her career, Jing-Pei has collaborated with notable colleagues, including Roderick Craig Mosely and Ted Tie Guo. These collaborations have contributed to her success and the advancement of semiconductor technologies.
Conclusion
Jing-Pei Chou's contributions to semiconductor technology through her innovative patents demonstrate her expertise and commitment to advancing the field. Her work continues to influence the development of efficient and reliable semiconductor devices.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile