Company Filing History:
Years Active: 2001-2003
Title: Jinbin Feng: Innovator in Semiconductor Technology
Introduction
Jinbin Feng is a notable inventor based in Tigard, Oregon, who has made significant contributions to the field of semiconductor technology. With a total of 2 patents, he has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Feng's latest patents include a "Wafer chuck for use in edge bevel removal of copper from silicon wafers." This invention features alignment members that allow a semiconductor wafer to be properly aligned on the chuck without the need for a separate alignment stage. The alignment members, which may be cams attached to the arms of the wafer chuck, guide the wafer into the correct position during placement by a robot arm. As the wafer rotates, these members move away to allow liquid etchant to flow over the edge region, and at higher speeds, the wafer is clamped to prevent it from flying off the chuck.
Another significant patent is the "Etchant mixing system for edge bevel removal of copper from silicon wafers." This chemical etching system combines sulfuric acid and hydrogen peroxide to effectively remove residual copper from the edge bevel region of a semiconductor wafer. The system includes a dilution module that prepares the etchant solution immediately before use, minimizing the presence of oxygen bubbles that could affect the etching process.
Career Highlights
Jinbin Feng is currently employed at Novellus Systems Incorporated, where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the methods used in the manufacturing of semiconductor devices.
Collaborations
Feng collaborates with esteemed colleagues such as Steven T Mayer and John B Alexy, contributing to a dynamic team focused on pushing the boundaries of semiconductor technology.
Conclusion
Jinbin Feng's contributions to semiconductor technology through his patents and work at Novellus Systems Incorporated highlight his role as a key innovator in the field. His inventions not only improve manufacturing processes but also pave the way for future advancements in semiconductor technology.