Jin Shibata

Title: The Innovative Contributions of Jin Shibata

Introduction

Jin Shibata is a notable inventor based in Toyama, Japan. He has made significant contributions to the field of substrate processing technology. His work is characterized by a focus on improving the efficiency and effectiveness of transfer chambers in various applications.

Latest Patents

Jin Shibata holds a patent for a "Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber." This invention features a configuration that includes an intake damper and an intake fan that communicate with an intake port. The system is designed to suck air into a transfer chamber connected to a process chamber. It also includes a valve for an inert gas introduction pipe, which supplies an inert gas to the transfer chamber. The apparatus is equipped with an exhaust fan and a first exhaust valve installed in the transfer chamber. A switch allows the selection between an atmospheric mode, where the atmosphere is air, and a purge mode, where the atmosphere is inert gas. A controller manages the operation of the intake damper, intake fan, inert gas valve, exhaust fan, and first exhaust valve to execute the desired mode.

Career Highlights

Jin Shibata is currently employed at Kokusai Electric Corporation, where he continues to innovate and develop new technologies. His work has been instrumental in advancing substrate processing techniques, which are crucial in various industrial applications.

Collaborations

Throughout his career, Jin has collaborated with several talented individuals, including Satoru Takahata and Ichiro Nunomura. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Jin Shibata's contributions to substrate processing technology exemplify the impact of innovative thinking in engineering. His patent and ongoing work at Kokusai Electric Corporation highlight his commitment to advancing technology in this field.