Location History:
- Danbury, CT (US) (1996)
- Cupertino, CA (US) (1998)
Company Filing History:
Years Active: 1996-1998
Title: Jiming Zhang: Innovator in Chemical Vapor Deposition Technology
Introduction
Jiming Zhang is a notable inventor based in Danbury, CT (US), recognized for his contributions to the field of chemical vapor deposition. With a total of 3 patents to his name, he has made significant advancements in the delivery of involatile reagents in gaseous form.
Latest Patents
Zhang's latest patents include a source reagent liquid delivery apparatus and a process for delivering an involatile reagent in gaseous form. The apparatus involves flash vaporizing an involatile reagent source liquid on a vaporization matrix structure at elevated temperatures. A carrier gas flows past this matrix structure, resulting in a carrier gas mixture that contains the flash vaporized source reagent. The matrix structure is designed to have a high surface-to-volume ratio and may consist of a foraminous matrix element, such as screen mesh, onto which the reagent source liquid is distributed for flash vaporization. This invention is particularly beneficial for delivering Group II reagents and compounds, including early transition metals like zirconium and hafnium. It is also applicable for forming interlayers of Group II metal fluorides and for depositing thin films of photonic and ferroelectric materials.
Career Highlights
Jiming Zhang is currently employed at Advanced Technology Materials, Inc., where he continues to innovate in the field of chemical vapor deposition. His work has contributed to advancements in various applications, particularly in the semiconductor and materials science industries.
Collaborations
Throughout his career, Zhang has collaborated with notable colleagues, including Peter S. Kirlin and Robin L. Binder. These collaborations have further enhanced his research and development efforts in the field.
Conclusion
Jiming Zhang's innovative work in chemical vapor deposition technology has made a significant impact on the industry. His patents reflect a commitment to advancing the science of reagent delivery, showcasing his expertise and dedication to innovation.