Jimi Hendriks

Title: Jimi Hendriks: Innovator in Lithographic Technology

Introduction

Jimi Hendriks is a notable inventor based in Eindhoven, Netherlands. He has made significant contributions to the field of lithographic technology, particularly in the area of dynamic gas lock membranes and pupil facet mirrors. His innovative work has led to the development of methods for detecting membrane rupture in lithographic apparatuses.

Latest Patents

Hendriks holds a patent for "End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses." This patent describes methods, devices, and systems for rupture detection and end-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors. The method involves illuminating the dynamic gas lock membrane with a measurement beam and determining whether any radiation is reflected from it. A rupture is detected if no radiation is reflected, indicating a failure in the membrane.

Career Highlights

Jimi Hendriks is associated with ASML Holding N.V. and ASML Netherlands B.V., where he has been instrumental in advancing lithographic technologies. His work has been pivotal in enhancing the reliability and efficiency of lithographic processes used in semiconductor manufacturing.

Collaborations

Hendriks has collaborated with notable colleagues such as Joseph Harry Lyons and Ping Zhou. Their combined expertise has contributed to the innovative advancements in the field of lithography.

Conclusion

Jimi Hendriks is a distinguished inventor whose work in lithographic technology has paved the way for improved methods of monitoring and detecting failures in critical components. His contributions continue to influence the semiconductor industry significantly.