Jim Keller

Title: Jim Keller: Innovator in Semiconductor Technology

Introduction

Jim Keller is a prominent inventor based in Livermore, CA (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to wafer cleaning and drying processes.

Latest Patents

Keller's latest patents include "Methods for Wafer Proximity Cleaning and Drying" and "Capillary Proximity Heads for Single Wafer Cleaning and Drying." The first patent describes a method for preparing a semiconductor wafer surface by utilizing a plurality of source inlets and outlets. This method involves applying isopropyl alcohol (IPA) vapor gas to the wafer surface while simultaneously introducing a fluid through the source inlets. The IPA vapor gas and fluid are then removed through the source outlets, ensuring a clean wafer surface. The second patent presents a wafer cleaner and dryer designed for wafer manufacturing operations. This device features a proximity head that moves toward the wafer surface to perform cleaning or drying operations, utilizing pressure differences to effectively remove fluid films from the wafer.

Career Highlights

Jim Keller is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work at Lam Research has allowed him to develop and refine innovative technologies that enhance wafer processing efficiency.

Collaborations

Keller has collaborated with notable colleagues, including John Martin De Larios and Mike Ravkin. These partnerships have contributed to the advancement of semiconductor technologies and the successful implementation of his patented methods.

Conclusion

Jim Keller's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his role as an influential inventor in the industry. His innovative methods for wafer cleaning and drying continue to impact the field positively.