Jihoon Na

Title: Jihoon Na: Innovator in Extreme Ultraviolet Technology

Introduction

Jihoon Na is a prominent inventor based in Bucheon-si, South Korea. He has made significant contributions to the field of extreme ultraviolet (EUV) technology, holding two patents that showcase his innovative approach to this advanced area of research.

Latest Patents

His latest patents include an "Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system." This apparatus is designed to generate EUV light through a sophisticated process involving a plasma source and a laser. The system incorporates a filter to extract EUV light, along with a protective layer and a frame that optimizes the light generation process.

Another notable patent is the "Extreme ultraviolet (EUV) mask inspection system, a load-lock chamber included therein, and a method for inspecting an EUV mask using the EUV mask inspection system." This system features a mask receiving unit, a main chamber for inspection, and a load-lock chamber that facilitates the process. The load-lock chamber is equipped with a mask table, UV lamp, cold trap, and vacuum pump, all working together to ensure the effective inspection of EUV masks.

Career Highlights

Jihoon Na has worked with leading organizations such as Samsung Electronics Co., Ltd. and Sungkyunkwan University. His experience in these esteemed institutions has allowed him to refine his skills and contribute to groundbreaking advancements in EUV technology.

Collaborations

Throughout his career, Jihoon has collaborated with notable colleagues, including Jaewhan Sung and Hyunjune Cho. These partnerships have further enriched his work and fostered innovation in the field.

Conclusion

Jihoon Na's contributions to extreme ultraviolet technology through his patents and career achievements highlight his role as a key innovator in this specialized field. His work continues to influence advancements in technology and research.