Company Filing History:
Years Active: 2024
Title: Jiangtao Pei: Innovator in Plasma Processing Technology
Introduction
Jiangtao Pei is a notable inventor based in Shanghai, China. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique patent that enhances the efficiency of semiconductor manufacturing processes.
Latest Patents
Jiangtao Pei holds a patent for a bottom electrode assembly, plasma processing apparatus, and method of replacing a focus ring. This invention discloses a bottom electrode assembly that includes a base for supporting a wafer to be processed. It features a focus ring surrounding the outer periphery of the base and a cover ring beneath the focus ring. The design incorporates a plurality of recesses arranged along the circumferential direction of the cover ring, with moving blocks provided in these recesses. Each moving block has a step designed to support part of the focus ring. A drive device is connected to the moving blocks, allowing for the focus ring to be moved up and down. This innovative assembly enables the replacement of the focus ring without the need to open the process chamber, thereby improving operational efficiency.
Career Highlights
Jiangtao Pei is currently employed at Advanced Micro-Fabrication Equipment Inc. in China. His work at this company has positioned him as a key player in the advancement of micro-fabrication technologies. His contributions have been instrumental in enhancing the capabilities of plasma processing equipment.
Collaborations
Jiangtao Pei has collaborated with notable colleagues, including Zengdi Lian and Rason Zuo. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Jiangtao Pei's contributions to plasma processing technology through his innovative patent demonstrate his commitment to advancing the field. His work not only enhances manufacturing processes but also showcases the importance of collaboration in driving technological advancements.