Company Filing History:
Years Active: 2022-2025
Title: Jewoo Han: Innovator in Plasma Etching Technology
Introduction
Jewoo Han is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of plasma etching technology, holding a total of 6 patents. His work is instrumental in advancing the efficiency and effectiveness of plasma etching processes.
Latest Patents
Among his latest innovations is an apparatus and method for plasma etching. This invention features an electrostatic chuck that includes a base layer, a bonding layer, and an adsorption layer with multiple protrusions. These protrusions contact the lower surface of a substrate, while an edge ring surrounds the substrate's lateral surface. The apparatus also incorporates several coolant suppliers that inject coolant between the protrusions, along with pipes that circulate the coolant in a predetermined direction. The cooling device is designed to manage the plasma etching process through first and second operations, ensuring the electrostatic chuck reaches specific temperatures during each phase. A controller is included to regulate the valve connected to the pipes, determining the coolant's circulation direction.
Career Highlights
Jewoo Han is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop new technologies. His expertise in plasma etching has positioned him as a key player in the semiconductor industry.
Collaborations
He collaborates with talented coworkers, including Jongwoo Sun and Kyohyeok Kim, who contribute to his projects and enhance the innovative environment at Samsung Electronics.
Conclusion
Jewoo Han's contributions to plasma etching technology exemplify his dedication to innovation and excellence in the field. His patents reflect a commitment to advancing technology and improving manufacturing processes.