Jerome Crocco

Title: Jerome Crocco: Innovator in Semiconductor Polishing Technology

Introduction

Jerome Crocco is a notable inventor based in Chicago, IL, recognized for his contributions to semiconductor technology. With a total of 2 patents, Crocco has made significant advancements in automated chemical polishing systems.

Latest Patents

One of Crocco's latest patents is an automated chemical polishing system adapted for soft semiconductor materials. This innovative system allows at least one wafer to be suspended on a respective jig shaft above a polishing platen. The degree of parallelism between the wafer and the polishing platen is controlled using a three-point suspension, which facilitates planar pitch adjustments through vertical actuation algorithms. As the wafer is lowered into contact with the polishing platen, a load cell measures the weight supported by the jig, wafer mount, and wafer. The vertical displacement of the wafer is managed by a linear actuator that responds to signals from the load cell. This vertical actuation increases or decreases the supported weight, thereby adjusting the down-force applied between the wafer and the platen. A compression spring enhances the resolution of the pressure control, and all system components exposed to the work environment are encapsulated with chemically resistive materials to prevent corrosion.

Career Highlights

Crocco is currently employed at Epir Technologies, Inc., where he continues to develop innovative solutions in the field of semiconductor processing. His work has been instrumental in improving the efficiency and effectiveness of polishing techniques used in the industry.

Collaborations

One of Crocco's notable coworkers is Rasdip Singh, with whom he collaborates on various projects within the company.

Conclusion

Jerome Crocco's contributions to semiconductor technology through his innovative patents and work at Epir Technologies, Inc. highlight his role as a key figure in advancing the field of automated chemical polishing systems.