This inventor holds 2 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 1999.
Company Filing History:
Years Active: 1999
Title: Innovations by Jeff Plante in Liquid Flow Control
Introduction
Jeff Plante is an accomplished inventor based in Pleasanton, CA (US). He has made significant contributions to the field of liquid flow control, holding 2 patents that enhance the precision of liquid precursor flow in deposition chambers. His work is instrumental in improving wafer uniformity, which is crucial in semiconductor manufacturing.
Latest Patents
Jeff Plante's latest patents include innovative methods for in-situ liquid flow rate estimation and verification. The first patent describes an apparatus that utilizes a sonic flow method to control the flow of a liquid precursor into a deposition chamber. This system comprises a liquid injection system with a liquid precursor supply, carrier gas supply, vaporizer, and a controller that manages the flows. The calibration process involves measuring steady state pressures to ensure accurate liquid flow rates.
The second patent focuses on direct liquid measurement for controlling the flow of a liquid precursor. This apparatus also includes a liquid injection system and a liquid flow meter. By using a purge gas to push a known mass of liquid through the flow meter, the system can accurately calibrate the liquid flow rate, further enhancing wafer uniformity.
Career Highlights
Jeff Plante is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His expertise in liquid flow control has positioned him as a key contributor to advancements in deposition technologies. His innovative approaches have garnered attention and recognition within the industry.
Collaborations
Throughout his career, Jeff has collaborated with notable colleagues, including Yen-Kun Victor Wang and Fong M Chang. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Jeff Plante's contributions to liquid flow control through his patents and work at Applied Materials, Inc. highlight his significant role in advancing semiconductor manufacturing technologies. His innovative solutions continue to impact the industry positively.