Company Filing History:
Years Active: 2002-2003
Title: Innovations of Jean Qing Lu
Introduction
Jean Qing Lu is a prominent inventor based in Palo Alto, CA. He has made significant contributions to the field of physical vapor deposition technology. With a total of 5 patents to his name, Lu continues to push the boundaries of innovation in his industry.
Latest Patents
One of his latest patents is titled "Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron." This invention involves a hollow cathode magnetron that features an open top target within the cathode. The design allows for the target to be biased to a negative potential, generating an electric field that creates plasma. The magnetron employs electromagnetic coils to shape and maintain plasma density. Additionally, the open top target can be configured in various geometries, including flat annular, conical, and cylindrical shapes.
Another notable patent is the "Pasting method for eliminating flaking during nitride sputtering." This invention addresses the issue of metal or metal-derived material flaking during the sputter processing of substrates. The methods developed are particularly effective for non-planar sputter targets. By modulating the magnetic field configuration during the pasting process, flaking from the target and other internal components is inhibited through techniques such as encapsulation and material removal via high-density plasma.
Career Highlights
Jean Qing Lu is currently employed at Novellus Systems Incorporated, where he applies his expertise in vapor deposition technologies. His work has been instrumental in advancing the capabilities of sputtering processes and improving the reliability of thin film applications.
Collaborations
Lu collaborates with several talented individuals in his field, including Jeffrey A. Tobin and Linda Lee Stenzel. Their combined efforts contribute to the innovative projects at Novellus Systems.
Conclusion
Jean Qing Lu's contributions to the field of physical vapor deposition are noteworthy, with multiple patents that showcase his innovative spirit. His work continues to influence advancements in technology and manufacturing processes.
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