Jangwoon Sung

Title: Jangwoon Sung: Innovator in Substrate Inspection Technology

Introduction

Jangwoon Sung is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in substrate inspection methods and apparatuses. With a total of two patents to his name, his work has advanced the capabilities of substrate processing.

Latest Patents

Jangwoon Sung's latest patents include a substrate inspection apparatus and a substrate inspection method. The substrate inspection apparatus features a light irradiator that includes an objective lens and multiple optical fibers. This design allows for effective light irradiation on a semiconductor substrate with various circuit pattern layers. The light generator within the apparatus can adjust the irradiation angle, enabling selective light distribution to the objective lens and optical fibers. Additionally, a light analyzer captures images of the circuit pattern layers, modeling them to measure overlay accuracy.

Another significant patent is a level sensor and substrate processing apparatus. This invention includes a level sensor that detects the height level of a substrate. The sensor utilizes a measurement light source and a prism to split reflected light into polarized components, generating an optical path length difference. This technology enhances the precision of substrate processing by providing accurate height measurements.

Career Highlights

Throughout his career, Jangwoon Sung has worked with prominent organizations, including Samsung Electronics Co., Ltd. and Boston University. His experience in these institutions has allowed him to refine his skills and contribute to cutting-edge research in semiconductor technology.

Collaborations

Jangwoon Sung has collaborated with talented individuals such as Sungho Jang and Sangwoo Bae. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Jangwoon Sung's contributions to substrate inspection technology demonstrate his expertise and commitment to advancing semiconductor processing. His innovative patents reflect a deep understanding of the complexities involved in this field.