Jang-Yeob Lee

Title: Jang-Yeob Lee: Innovator in Plasma Processing Technology

Introduction

Jang-Yeob Lee is a prominent inventor based in Hwaseong, South Korea. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work is instrumental in advancing the capabilities of plasma processing apparatuses, which are essential in various industrial applications.

Latest Patents

One of Jang-Yeob Lee's latest patents is a plasma processing apparatus and method. This innovative apparatus includes a chamber that provides a space for processing a substrate. It features a substrate stage designed to support the substrate within the chamber, which includes a lower electrode and an upper electrode facing each other. Additionally, the apparatus incorporates a focus ring located in the upper peripheral region of the substrate stage to surround the substrate. A notable aspect of this invention is the plasma adjustment assembly, which can be positioned between the upper and lower electrodes or between the focus ring and the lower electrode. This assembly consists of a photoreactive material layer and multiple light sources that irradiate light onto a specific region of the photoreactive material layer. As the light is applied, the capacitance of the local region is altered, enhancing the processing capabilities of the apparatus.

Career Highlights

Jang-Yeob Lee is currently employed at Samsung Electronics Co., Ltd., a leading global technology company. His role at Samsung has allowed him to work on cutting-edge technologies and contribute to the company's innovative projects. His expertise in plasma processing has positioned him as a key figure in the development of advanced manufacturing techniques.

Collaborations

Throughout his career, Jang-Yeob Lee has collaborated with talented individuals such as Sungyeol Kim and Jinyeong Yun. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Jang-Yeob Lee is a notable inventor whose work in plasma processing technology has made a significant impact in the field. His patents and contributions to Samsung Electronics Co., Ltd. highlight his dedication to innovation and excellence in technology.