Company Filing History:
Years Active: 2001-2004
Title: Innovations by Janathan Wang
Introduction
Janathan Wang is an accomplished inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing through his innovative patents. With a total of 2 patents, Wang's work focuses on enhancing the efficiency and effectiveness of semiconductor production processes.
Latest Patents
Wang's latest patents include a Recycling Apparatus and a Wafer Backside Protection Apparatus. The Recycling Apparatus is designed for use in a spin etching and cleaning process chamber. It allows for the separation and recycling of different chemical solutions without the need for modifications to the chamber's exterior dimensions or main structure. This apparatus features a recycling ring that moves up and down to collect solutions and a circular tray for sorting chemical solutions into designated vessels.
The Wafer Backside Protection Apparatus consists of a motor, a vacuum chuck, an annular seat, and a top cover. The motor drives the chuck, which holds a wafer from its backside. The chuck is equipped with a water guard ring and slant bores that facilitate the ejection of protection liquid. This liquid forms a protective film between the chuck and the wafer, safeguarding it from chemical erosion and contamination during the production process.
Career Highlights
Janathan Wang is affiliated with the Industrial Technology Research Institute, where he continues to innovate in the semiconductor field. His work has been instrumental in advancing technologies that improve manufacturing processes and product quality.
Collaborations
Wang collaborates with notable colleagues, including Fu-Ching Tung and Peter L Mahneke, who contribute to his research and development efforts.
Conclusion
Janathan Wang's contributions to semiconductor manufacturing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work not only enhances production efficiency but also ensures the quality and reliability of semiconductor devices.