James W Wilkinson

Title: James W. Wilkinson: Innovator in Ion Beam Measurement Technology

Introduction

James W. Wilkinson is a notable inventor based in Topsfield, MA (US). He has made significant contributions to the field of ion beam measurement technology. His innovative work has led to the development of a unique system that enhances the accuracy of ion beam current measurements in process chambers.

Latest Patents

James W. Wilkinson holds a patent for an "Ion beam measurement system and method." This system involves measuring ion beam current in a process chamber using conductive liners. The conductive liner serves to shield the walls of the process chamber. An ion measuring device, such as an ammeter, is utilized to measure the current generated by ions impacting the conductive liner. In certain embodiments, a mechanism is included to contain secondary electrons produced in the process chamber. Furthermore, the system allows for the measurement of ions impacting the scan system or workpiece, enabling the total current of the ion beam to be accurately assessed. He has 1 patent to his name.

Career Highlights

James W. Wilkinson is associated with Varian Semiconductor Equipment Associates, Inc., where he applies his expertise in ion beam technology. His work at this company has been instrumental in advancing semiconductor manufacturing processes.

Collaborations

James has collaborated with notable colleagues, including Joseph P. Dzengeleski and Eric D. Hermanson. Their combined efforts have contributed to the development of innovative solutions in the field of semiconductor equipment.

Conclusion

James W. Wilkinson's contributions to ion beam measurement technology exemplify his commitment to innovation in the semiconductor industry. His patent and work at Varian Semiconductor Equipment Associates, Inc. highlight his role as a key figure in advancing measurement systems.