James L Fink

Title: The Innovations of James L. Fink

Introduction

James L. Fink is an accomplished inventor based in Millburn, NJ (US). He is known for his significant contributions to the field of semiconductor processing. With a focus on enhancing the efficiency and effectiveness of wafer handling, Fink has made strides in the technology sector.

Latest Patents

Fink holds a patent for a "Wafer holding apparatus and method." This innovative device features at least three spring-mounted members that are strategically positioned around the periphery of an aperture in a wafer-mounting plate. These members engage and securely hold the edge portions of a semiconductor wafer during processing. The design allows for the wafer to be easily moved into or out of the aperture using a vacuum chuck that only contacts the back side of the wafer. Once the wafer is inserted, the actuated members are released, engaging the edges and exerting radial holding forces. This method ensures optimal thermal and electrical contact between the wafer and the pedestal element in a processing chamber.

Career Highlights

Fink has made significant contributions during his tenure at AT&T Bell Laboratories. His work has focused on improving semiconductor processing techniques, which are crucial for the advancement of electronic devices. His innovative approach has led to practical solutions that enhance the reliability and performance of semiconductor wafers.

Collaborations

Fink has collaborated with notable professionals in his field, including Robert E. Dean. Their joint efforts have contributed to advancements in semiconductor technology and have fostered a collaborative environment that encourages innovation.

Conclusion

James L. Fink's contributions to the field of semiconductor processing through his patent and work at AT&T Bell Laboratories highlight his role as a key innovator. His inventions continue to influence the industry and pave the way for future advancements in technology.