James K Paulsen

Title: Innovations of James K Paulsen

Introduction

James K Paulsen is a notable inventor based in Jericho, Vermont, known for his contributions to semiconductor technology. He holds 2 patents that showcase his expertise in the field. His work primarily focuses on methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Paulsen's latest patents is the "Via-filling and planarization technique." This method involves forming a plurality of conductive studs within a non-planar insulator layer, such as PSG or BPSG, which is situated between a series of conductive structures on a substrate and metal lines on the insulator's upper surface. The process includes defining vertical vias through the insulator layer to expose at least one of the first conductive structures. A conformal metal layer, such as CVD W, is then deposited to fill the vias. The metal layer and insulator layer undergo a polish etch with an abrasive slurry to remove excess metal while simultaneously planarizing the insulator layer.

Another significant patent is the "System for mechanical planarization." This invention describes a polishing tool designed for abrasively polishing a semiconductor wafer. The tool edge clamps the wafer between two rollers, allowing the wafer to spin in one plane while the rollers spin in a second, orthogonal plane. One roller is split, with each section rotating in opposite directions, and both rollers are mounted on a spring-gimballed assembly to follow the wafer's contour.

Career Highlights

James K Paulsen is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the semiconductor field. His work at IBM has allowed him to contribute significantly to advancements in technology and manufacturing processes.

Collaborations

Throughout his career, Paulsen has collaborated with notable colleagues, including Michael A Leach and William J Cote. These collaborations have fostered an environment of innovation and have led to the development of groundbreaking technologies in the semiconductor industry.

Conclusion

James K Paulsen's contributions to semiconductor technology through his patents and work at IBM highlight his role as a significant inventor in the field. His innovative techniques continue to influence the manufacturing processes of semiconductors, showcasing the importance of his work in advancing technology.