This inventor holds 2 USPTO granted patents. Top assignee: Orc Technologies, Inc.. Active years: 2001-2003.
Company Filing History:
Years Active: 2001-2003
Title: Innovations by James H. Beauchene
Introduction
James H. Beauchene is an accomplished inventor based in Norco, CA (US). He has made significant contributions to the field of photolithography, particularly in the development of apparatuses for exposing substrates. With a total of 2 patents, Beauchene's work has advanced the technology used in various manufacturing processes.
Latest Patents
One of Beauchene's latest patents is an "Apparatus and method for exposing substrates." This invention provides a method for the proximity photolithography of large substrates. The apparatus includes a mask frame that holds the mask in a substantially vertical position. A tiltable platen is designed to receive a photoresist-coated substrate in a horizontal position. The platen features a vacuum chuck that secures the substrate. By tilting the platen, the substrate can be aligned parallel to the mask. A motor moves the mask into close proximity with the substrate, initiating a scanning exposure. This exposure is facilitated by a rail-mounted shuttle that produces a collimated light beam. A servo motor drives the shuttle along the rail to perform the scanning exposure. After the exposure is completed, the mask is moved away, and the platen is lowered to its horizontal position. The vacuum chuck then disengages the exposed substrate, which is transported away. The platen can subsequently receive another substrate for exposure, allowing the process to be repeated.
Career Highlights
James H. Beauchene is currently employed at Orc Technologies, Inc. His innovative work has positioned him as a key figure in the field of photolithography. His inventions have not only contributed to technological advancements but have also enhanced manufacturing efficiency.
Collaborations
Beauchene has collaborated with notable coworkers, including Eugene J. Melbon and Victor M. Jacobo. Their combined expertise has fostered a productive environment for innovation and development.
Conclusion
James H. Beauchene's contributions to the field of photolithography through his patents and collaborations highlight his role as a significant inventor. His work continues to influence the industry and pave the way for future innovations.