Location History:
- Richardson, TX (US) (1993)
- Garland, TX (US) (1980 - 1996)
Company Filing History:
Years Active: 1980-1996
Title: Innovations of James G. Frank
Introduction
James G. Frank is a notable inventor based in Richardson, TX (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on enhancing the efficiency and effectiveness of semiconductor processing techniques.
Latest Patents
One of his latest patents is titled "Method and apparatus of etching a clean trench in a semiconductor." This invention involves an etching apparatus that includes a process chamber partially surrounded by upper and lower electrodes. The lower electrode is connected to two power supplies operating at different frequencies, allowing for improved anisotropic control during the trench etching process. This innovation eliminates the need for sidewall deposition enhancing materials, thereby preventing residue buildup in the process chamber.
Another significant patent by Frank is "Oxygen scavenging in a plasma reactor." This invention addresses the removal of trace amounts of oxygen from a plasma reactor by utilizing a heated filament. The filament reacts with the oxygen, forming an oxide, which enhances the efficiency of the plasma reactor during processing times.
Career Highlights
James G. Frank is currently employed at Texas Instruments Corporation, where he continues to innovate in the semiconductor field. His work has contributed to advancements in semiconductor manufacturing processes, making them more efficient and reliable.
Collaborations
Throughout his career, Frank has collaborated with several talented individuals, including Gabriel George Barna and Richard P. VanMeurs. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
James G. Frank's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of semiconductor processing.