Location History:
- Shingle Springs, CA (US) (1998 - 1999)
- Fremont, CA (US) (2000)
Company Filing History:
Years Active: 1998-2000
Title: Innovations of James D Buhler
Introduction
James D Buhler is a notable inventor based in Shingle Springs, California. He has made significant contributions to the field of semiconductor manufacturing, holding a total of four patents. His work focuses on improving the processes involved in polishing substrates, which is crucial for achieving high-quality surfaces in semiconductor devices.
Latest Patents
One of his latest inventions is the "Containment ring for substrate carrier apparatus." This invention features a containment ring designed to work with a substrate carrier used for polishing. The containment ring tilts independently of the substrate carrier platen, supporting a small perimeter portion of the substrate's back side during polishing while allowing the substrate to precess.
Another significant patent is the "Apparatus for chemical mechanical polishing." This invention outlines a method and apparatus for polishing semiconductor wafers. The wafer is held in place by a tooling head and is contacted by an abrasive pad. The apparatus includes a table that moves in parallel with the wafer's face, controlled by a system that maintains a constant velocity. The tooling head features a circular platen and a retention ring that resists lateral forces during polishing, ensuring precision and stability.
Career Highlights
James D Buhler has established himself as a key figure in the semiconductor industry through his innovative designs and patents. His work at Obsidian, Inc. has allowed him to collaborate with other talented professionals in the field, further enhancing the quality and efficiency of semiconductor manufacturing processes.
Collaborations
Some of his notable coworkers include Roger O Williams and Jon A Hoshizaki. Their combined expertise contributes to the advancement of technologies in the semiconductor sector.
Conclusion
James D Buhler's contributions to the field of semiconductor manufacturing through his patents and collaborative efforts have made a significant impact. His innovative approaches continue to shape the industry and improve the quality of semiconductor devices.