Company Filing History:
Years Active: 2005-2020
Title: Innovations of James C. Vetter
Introduction
James C. Vetter is a notable inventor based in Pine Grove, CA (US). He has made significant contributions to the field of semiconductor processing, holding a total of six patents. His work focuses on improving the efficiency and effectiveness of wafer processing technologies.
Latest Patents
One of his latest patents is titled "Edge ring assembly for improving feature profile tilting at extreme edge of wafer." This invention includes an upper edge ring designed to surround an electrostatic chuck (ESC), which supports a substrate. The design features an annular step that defines a shelf lower than the top surface of the ESC. Additionally, a lower inner edge ring made from electrically conductive material is insulated from the ESC, while a lower outer edge ring is made from electrically insulating material.
Another significant patent is "Measuring and controlling wafer potential in pulsed RF bias processing." This invention provides methods for monitoring a pulsed RF bias signal applied to a chuck in a processing chamber. The method involves detecting voltage values of individual pulses and determining the optimal sampling time for each pulse. A feedback signal is generated to adjust the pulsed RF bias voltage signal according to the desired voltage value.
Career Highlights
James C. Vetter is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop innovative solutions that enhance wafer processing techniques.
Collaborations
Throughout his career, Vetter has collaborated with talented individuals such as Andras Kuthi and Stephen Hwang. These collaborations have contributed to the advancement of technologies in the semiconductor field.
Conclusion
James C. Vetter's contributions to semiconductor processing through his patents and work at Lam Research Corporation highlight his innovative spirit and dedication to advancing technology. His inventions continue to impact the industry positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.