This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2003.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2003
Title: Innovations of Jai-Heung Choi in Photolithography Equipment
Introduction
Jai-Heung Choi is a notable inventor based in Yongin, South Korea. He has made significant contributions to the field of photolithography equipment, particularly in the design of air shower heads that enhance the manufacturing process of semiconductor wafers. His innovative approach focuses on reducing contamination risks during the exposure process.
Latest Patents
One of Jai-Heung Choi's key patents is for an air shower head of photolithography equipment designed for directing air towards a wafer stage. This invention is crucial as it eliminates chemical substances that could contaminate the photoresist layer on a semiconductor wafer, thereby preserving the integrity of the photoresist pattern. The air shower head is strategically positioned between the lens system of the exposure device and the wafer stage. It features a central hole that allows exposure light to pass through to the wafer. The design includes an upper frame that defines a cavity open at the bottom, along with a porous bottom member that covers the frame's base. This porous member is mechanically secured to the frame's inner and outer side walls without chemical binders, minimizing contamination risks.
Career Highlights
Jai-Heung Choi is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor manufacturing technologies.
Collaborations
Jai-Heung Choi collaborates with talented coworkers such as Yo-Han Ahn and Hyun-Joon Kim. Their combined expertise fosters a creative environment that drives innovation in their projects.
Conclusion
Jai-Heung Choi's contributions to photolithography equipment exemplify the importance of innovation in semiconductor manufacturing. His patented air shower head design significantly enhances the quality of photoresist patterns while reducing contamination risks.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile