Company Filing History:
Years Active: 2013
Title: Innovator Spotlight: Jaeyong Cho and His Semiconductor Substrate Support Patent
Introduction: Jaeyong Cho, an accomplished inventor based in Wappingers Falls, NY, has made significant contributions to the field of semiconductor technology. With a focus on enhancing the durability and performance of substrate supports, Cho has developed a patented invention that addresses critical challenges in semiconductor device manufacture.
Latest Patents: Cho holds one patent entitled "Substrate supports for semiconductor applications". This innovative invention relates to substrate supports, such as coated electrostatic chucks, which incorporate a dielectric multilayer designed to offer erosive and corrosive barrier protection. These substrate supports are essential in harsh environments commonly found in plasma treating vessels and deposition chambers used for processing substrates. The dielectric multilayer technology includes an undercoat dielectric layer made from metal oxide or metal nitride, positioned beneath a topcoat dielectric layer that consists of a metal oxide with minimal aluminum oxide content. This configuration optimizes corrosion resistance and plasma erosion resistance, thus enhancing the reliability of electrostatic chucks in semiconductor manufacturing.
Career Highlights: Jaeyong Cho currently works at Fm Industries, Inc., a company known for its innovations in semiconductor manufacturing technologies. Through his work, Cho has demonstrated a commitment to advancing material sciences and improving manufacturing processes essential for producing high-quality electronic devices. His patent represents a significant advancement in the field, demonstrating his expertise and innovative spirit.
Collaborations: In his professional journey, Cho collaborates closely with his coworker John Sirman. Together, they explore new methodologies and technologies aimed at optimizing semiconductor device manufacturing processes, contributing to the ongoing evolution of the industry.
Conclusion: Jaeyong Cho's inventive work stands as a testament to the crucial intersection of innovation and technology within the semiconductor industry. His patent on substrate supports reflects a deep understanding of the challenges faced in device manufacture and emphasizes the importance of protective technologies. As semiconductor applications continue to evolve, Cho's contributions will undoubtedly play a vital role in shaping the future of electronic device development.