Jae Lyang Jung

Title: Jae Lyang Jung: Innovator in Particle Detection Technology

Introduction

Jae Lyang Jung is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of particle detection technology, particularly through his innovative patent.

Latest Patents

Jae Lyang Jung holds a patent for a Chuck Stage Particle Detection Device. This device includes a chuck stage designed to seat a wafer, along with first and second adsorption holes shaped as closed concentric curves. The device features a first adsorption module connected to the first adsorption hole, which provides vacuum pressure, and a second adsorption module connected to the second adsorption hole, also providing vacuum pressure. A pressure gauge measures the vacuum pressures of both adsorption holes, while a detection module receives these pressures to determine whether the wafer is fixed and if any particles are present. The sequential provision of vacuum pressure by the first and second adsorption modules enhances the device's functionality.

Career Highlights

Jae Lyang Jung is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop advanced technologies. His work has positioned him as a key figure in the realm of semiconductor manufacturing and particle detection.

Collaborations

Throughout his career, Jae Lyang Jung has collaborated with talented colleagues, including Mu Yer Lee and Hyo Bum Kang. These partnerships have fostered a creative environment that encourages innovation and technological advancement.

Conclusion

Jae Lyang Jung's contributions to particle detection technology exemplify his commitment to innovation. His patent for the Chuck Stage Particle Detection Device showcases his expertise and dedication to improving semiconductor processes.