Jae-hee Lee

Title: Jae-hee Lee: Innovator in Laser Annealing Technology

Introduction

Jae-hee Lee is a prominent inventor based in Daegu, South Korea. He is known for his contributions to semiconductor technology, particularly in the field of laser annealing. With a focus on enhancing the efficiency and precision of semiconductor manufacturing, Lee has made significant strides in this innovative area.

Latest Patents

Jae-hee Lee holds a patent for a "Laser annealing apparatus for semiconductors having multiple laser energy measuring means." This advanced apparatus includes a laser oscillating structure, an oscillator, a beam expanding telescope, a first power meter, and a second power meter. The laser oscillating structure emits a first laser beam of a first wavelength and first beam cross-section to a substrate in a chamber that includes an optical window. The oscillator emits a second laser beam, of a second wavelength different from the first wavelength, to the substrate. The beam expanding telescope is positioned on the optical path for the second laser beam and expands it to a second beam cross-section. The first and second power meters measure the energy of the second laser beam and a third laser beam generated as the second laser beam is reflected by the substrate. Notably, the first beam cross-section and the second beam cross-section may be equal. This innovation is crucial for improving the performance and reliability of semiconductor devices.

Career Highlights

Jae-hee Lee is currently employed at Samsung Electronics Co., Ltd., a leading global technology company. His work at Samsung has allowed him to collaborate with some of the brightest minds in the industry, contributing to groundbreaking advancements in semiconductor technology.

Collaborations

Throughout his career, Jae-hee Lee has worked alongside talented colleagues, including Joong-han Shin and Supakit Charnvanichborikarn. These collaborations have fostered an environment of innovation and creativity, leading to significant technological advancements.

Conclusion

Jae-hee Lee's contributions to laser annealing technology exemplify the spirit of innovation in the semiconductor industry. His patent and work at Samsung Electronics Co., Ltd. highlight his commitment to advancing technology and improving manufacturing processes.