Company Filing History:
Years Active: 2000-2001
Title: Innovations by Jackie Zhang in Semiconductor Cleaning Technology
Introduction
Jackie Zhang is an accomplished inventor based in Cupertino, CA, known for his contributions to semiconductor cleaning technology. With a total of 2 patents, he has developed innovative methods that enhance the efficiency and effectiveness of substrate cleaning processes.
Latest Patents
Jackie Zhang's latest patents include an "Apparatus for HF-HF Cleaning" and a "Method of HF-HF Cleaning." The apparatus describes a substrate cleaning system where a substrate is placed into a first brush station while a chemical solution is delivered at a desired concentration level. The substrate is scrubbed in the first brush station before being transferred to a second brush station. The chemical solution is then delivered to a brush in the second brush station in a ramp-up manner to clean the brush. After this, deionized water is used to rinse the substrate, ensuring that the chemical solution is effectively removed. This method applies chemical solutions uniformly, reduces chemical volumes, and maintains control of the pH profile of the substrate.
Career Highlights
Jackie Zhang is currently employed at Lam Research Corporation, where he continues to innovate in the field of semiconductor manufacturing. His work focuses on improving cleaning processes that are critical for maintaining the quality of semiconductor substrates.
Collaborations
Jackie collaborates with talented coworkers, including Julia S Svirchevski and Katrina Mikhaylich, who contribute to the innovative environment at Lam Research Corporation.
Conclusion
Jackie Zhang's contributions to semiconductor cleaning technology through his patents demonstrate his commitment to advancing the field. His innovative methods not only improve cleaning efficiency but also play a crucial role in maintaining the integrity of semiconductor substrates.