Company Filing History:
Years Active: 1984
Title: Jack D. Foster: Innovator in Electron Beam Lithography
Introduction: Jack D. Foster, an inventor based in Los Altos, California, has made significant contributions to the field of electron beam lithography. With a patent to his name, Foster has demonstrated remarkable expertise and innovation in his area of work, particularly while collaborating with renowned colleagues in the industry.
Latest Patents: Foster's notable patent, titled "Electron Beam Blanker", revolutionizes the capabilities of electron beam lithography systems. This invention details an electron beam blanker that achieves exposure rates around 300 MHz at beam currents of approximately 600 nA. The device incorporates a condensing lens and a stigmator to ensure a minuscule image is produced in proximity to the beam's direction. Moreover, it features an etched silicon knife-edge, coated with gold, that sharpens the cut-off as the beam sweeps past. The innovation involves a deflector plate structure that generates an electromagnetic field, allowing the velocity of each electron to be proportionally correlated with its position vector. This design effectively minimizes spot motion during the blanker's rise time, enhancing the precision of lithographic processes.
Career Highlights: As an integral member of Hewlett-Packard Company, Jack D. Foster has played a pivotal role in advancing electron beam technology. His keen insights into the complexities of electron beam systems have positioned him as a thought leader in the realm of semiconductor fabrication and advanced manufacturing techniques.
Collaborations: Throughout his career, Foster has worked alongside esteemed professionals in the industry, including John R. Kelly and Huei P. Kuo. Their collaborative efforts have fostered an environment of innovation and excellence, driving forward advancements in electron beam lithography.
Conclusion: Jack D. Foster is a pioneering inventor whose contributions to the field of electron beam lithography continue to impact technology and manufacturing processes today. His patent not only exemplifies innovation but also underscores the importance of collaboration in achieving breakthroughs in complex engineering challenges. Foster's work reflects a commitment to advancing technology in the semiconductor industry.