Company Filing History:
Years Active: 2000-2001
Title: Innovations by J Peter Levin in Photomask Repair
Introduction
J Peter Levin is a notable inventor based in Winooski, VT (US). He has made significant contributions to the field of photomask repair, holding a total of 4 patents. His work focuses on innovative methods that enhance the durability and functionality of photomasks used in various applications.
Latest Patents
One of Levin's latest patents involves methods for the repair of photomasks. This method includes providing a coating on the mask to prevent damage to clear regions from laser ablation splatter, quartz pitting, laser deposition staining, and gallium staining caused by focused ion beam (FIB) processes. The coating can be made from metal, polymer, or carbon materials and is applied to both clear regions and areas over or under the light-absorbing material of the mask. A thin copper layer significantly improves imaging with the ion beam while protecting clear regions from FIB stains. Additionally, a photosensitive polymer coating is utilized to etch opaque defects, with subsequent repairs made in a FIB deposition step. In another embodiment, opaque defects can be repaired using a short pulse duration laser without damaging the underlying quartz or adjacent clear regions, thus eliminating the need for a coating.
Career Highlights
J Peter Levin is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the field of photomask technology. His work has been instrumental in advancing techniques that improve the reliability and performance of photomasks in various high-tech applications.
Collaborations
Levin has collaborated with notable coworkers such as Brian J Grenon and Richard Alan Haight, contributing to a dynamic team focused on cutting-edge research and development in photomask repair technologies.
Conclusion
J Peter Levin's contributions to the field of photomask repair demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the challenges in this area and provide effective solutions that enhance the performance of photomasks.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.