J Jerry Prochazka

Title: J Jerry Prochazka: Innovator in Atomic-Level Standards

Introduction

J Jerry Prochazka is a notable inventor based in Clayton, CA (US). He has made significant contributions to the field of metrology, particularly in the development of atomic-level standards. His work is essential for ensuring precision in various scientific and industrial applications.

Latest Patents

Prochazka holds a patent for the "Certification of an atomic-level step-height standard and instrument." This innovative patent describes an atomic-level step-height standard featuring step heights less than about 100 angstroms. The standard is designed as a silicon wafer die with a smooth reflective surface, incorporating a periodic pattern of alternating parallel flat linear mesas and valleys with a rectangular cross-section. The periodicity of this pattern is less than 100 micrometers, ideally around 20 micrometers. The certification process involves measuring the pitch and line or space width of the mesas or valleys using a calibrated probe microscope. Additionally, it includes measuring a bidirectional reflectance distribution function for light scattered from the periodic pattern using an angle-resolved scatterometer. From these measurements, a one-dimensional power spectral density function is calculated, leading to the derivation of an RMS roughness value. The characteristic step height of the standard can then be certified, allowing it to be used for calibrating various step-height measuring instruments.

Career Highlights

Prochazka's career is marked by his dedication to advancing measurement standards. He has worked extensively in the field of metrology, contributing to the development of tools and standards that enhance measurement accuracy. His expertise has made him a valuable asset in the industry.

Collaborations

Prochazka collaborates with various professionals in his field, including his coworker, Bradley W Scheer. Their combined efforts contribute to the advancement of metrology and the development of innovative standards.

Conclusion

J Jerry Prochazka's work in atomic-level standards exemplifies the importance of precision in scientific measurement. His contributions continue to influence the field of metrology and enhance the accuracy of various measuring instruments.