Location History:
- Kikuchi, JP (2004)
- Kumamoto, JP (2010)
Company Filing History:
1 out of 3 
2 out of 832,718 Years Active: 2004-2010
Title: Innovations of Itsuo Araki: A Pioneer in Plasma Technology
Introduction
Itsuo Araki is a notable inventor based in Kikuchi, Japan, recognized for his significant contributions to the field of plasma technology. With a total of three patents to his name, Araki's innovations have made a profound impact on the manufacturing processes of semiconductor components, particularly in the application of plasma etching devices.
Latest Patents
Among his latest patents, Araki developed a "Member for plasma etching device and method for manufacture thereof." This invention involves a member featuring a coating film of yttrium oxide or YAG with specific thickness and surface roughness parameters, designed to enhance plasma resistance. It effectively prevents abnormal etching caused by changes in electric properties, ensuring prolonged use even with large 12-inch silicon wafers.
Another notable patent is the "Vertical type wafer supporting jig." This innovation presents a simplified structure for supporting multiple wafers without the risk of a ring-like support plate falling off. The design utilizes support pillars with strategically formed support groove portions, allowing for optimal stacking and securing of wafers at predetermined intervals.
Career Highlights
Araki's career has included invaluable experiences at Shin-Etsu Quartz Products Ltd., where he honed his expertise in material science and semiconductor manufacturing technology. His work is pivotal in pushing the boundaries of plasma technology, greatly influencing the industry's operational methods.
Collaborations
Throughout his career, Araki collaborated closely with fellow inventor Kyoichi Inaki, leveraging their combined knowledge to drive technological advancements in their field. Their partnership has demonstrated the collaborative spirit essential for innovation in high-tech industries.
Conclusion
Itsuo Araki's contributions to plasma technology through his patented inventions reflect his commitment to enhancing manufacturing processes in the semiconductor industry. His innovative solutions not only address critical challenges in plasma etching but also lay the groundwork for future advancements in this rapidly evolving field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.