Company Filing History:
Years Active: 2017
Title: Irina Paykin: Innovator in Metrology
Introduction
Irina Paykin is a prominent inventor based in Haifa, Israel. She has made significant contributions to the field of metrology, particularly in the area of overlay error computation. Her innovative work has implications for various applications in semiconductor manufacturing.
Latest Patents
Irina holds a patent for a "Symmetric target design in scatterometry overlay metrology." This patent describes metrology methods, systems, and targets that implement a side-by-side paradigm. The design utilizes adjacent cells with periodic structures to extract overlay errors by introducing controllable phase shifts or image shifts. This approach enables algorithmic computation of the overlay, while the periodic structures are designed to exhibit rotational symmetry to support computation and reduce errors. She has 1 patent to her name.
Career Highlights
Irina is currently employed at Kla Tencor Corporation, where she continues to advance her research and development efforts in metrology. Her work is crucial in enhancing the accuracy and efficiency of measurement systems used in the semiconductor industry.
Collaborations
Irina collaborates with notable colleagues, including Barak Bringoltz and Daniel Kandel. Their combined expertise contributes to the innovative projects at Kla Tencor Corporation.
Conclusion
Irina Paykin's contributions to metrology and her innovative patent demonstrate her commitment to advancing technology in the semiconductor field. Her work continues to influence the industry positively.