This inventor holds 1 USPTO granted patent. Top assignee: Semes Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Inkyu Park and His Substrate-Processing Heater Array Patent.
Introduction
Inkyu Park is an inventor based in Gunpo, South Korea, and is associated with Semes Co., Ltd. His patent work includes an invention for heating substrates during processing.
Latest Patents
Park is credited with 1 patent: “Heater Array and Apparatus for Processing a Substrate Including a Heater Array.” The disclosed apparatus includes a process chamber, a supporting unit, and a heater array. The array uses multiple heaters to create separate heating areas, with corresponding diodes electrically connected to the heaters and operated by a controller. Adjacent diodes are arranged in opposing directions.
Career Highlights
Park’s listed patent reflects work on heater-array design for substrate-processing equipment. The invention describes a configuration intended to provide multiple controlled heating areas within a processing apparatus.
Collaborations
The patent information names Chungwoo Lee and Sungyoun Jeon as Park’s coworkers.
Conclusion
Inkyu Park’s patent documents a heater-array approach for controlling heat across multiple areas in substrate-processing equipment.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile