This inventor holds 2 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2006-2009.
Company Filing History:
Years Active: 2006-2009
Title: In-su Ha: Innovator in Semiconductor Fabrication Technology
Introduction
In-su Ha is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of semiconductor device fabrication, holding 2 patents that enhance the efficiency and effectiveness of cleaning processes in semiconductor manufacturing.
Latest Patents
One of In-su Ha's latest patents is a method of cleaning semiconductor device fabrication apparatus. This innovative approach involves cleaning the apparatus after a conductive layer is formed on a metal oxide layer of a substrate. The substrate is placed on a heater within a process chamber, where the conductive layer is created by introducing source gases. After the substrate is transferred out of the chamber, by-products from the reaction between the source gases and the metal oxide layer adhere to surfaces inside the chamber. These by-products are then removed by evaporation, utilizing gas such as one of the source gases, allowing the process chamber to remain closed during the cleaning process.
Career Highlights
In-su Ha is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work focuses on improving semiconductor fabrication techniques, which are crucial for the advancement of electronic devices.
Collaborations
In his career, In-su Ha has collaborated with notable coworkers, including Yoon-bon Koo and Hyun-seok Lim. Their combined expertise contributes to the innovative projects at Samsung Electronics.
Conclusion
In-su Ha's contributions to semiconductor fabrication technology demonstrate his commitment to innovation in the electronics field. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing processes.