Company Filing History:
Years Active: 2004-2006
Title: Ilya Chizhov: Innovator in Optical Metrology
Introduction
Ilya Chizhov is a notable inventor based in Oakland, CA, who has made significant contributions to the field of optical metrology. With a total of 2 patents, his work focuses on improving the precision and efficiency of wafer positioning systems.
Latest Patents
Chizhov's latest patents include a "Fast wafer positioning method for optical metrology" and a "System and method for finding the center of rotation of an R-theta stage." The fast wafer positioning method involves three main steps: constructing an initial measurement recipe, performing a test run to refine the recipe, and using the refined recipe for processing production wafers. This innovative approach eliminates positioning errors without relying on optical images. The second patent addresses the determination of an offset between a field of view and the center of rotation of an R-theta stage, allowing for precise site location on a wafer during inspection.
Career Highlights
Ilya Chizhov is currently employed at Therma-Wave, Inc., where he continues to develop cutting-edge technologies in optical inspection systems. His expertise in this area has positioned him as a valuable asset to his company and the industry.
Collaborations
Chizhov collaborates with Martin Ebert, leveraging their combined knowledge and skills to advance their projects and innovations.
Conclusion
Ilya Chizhov's contributions to optical metrology through his patents and work at Therma-Wave, Inc. highlight his role as an influential inventor in the field. His innovative methods are paving the way for advancements in wafer processing and inspection technologies.