This inventor holds 1 USPTO granted patent and 4 published patent applications. Top assignees: Korea Institute of Machinery & Materials, Samsung Electronics Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
1 out of 366 
1 out of 6,542 Years Active: 2026
Title: Iljeong Heo and His Work in Substrate Processing
Introduction
Iljeong Heo is an inventor based in Suwon, South Korea. His work includes a patented scrubber design for processing waste gas in substrate manufacturing systems. He has 1 patent listed in the information provided.
Latest Patents
Heo’s patent, “Scrubber, Substrate Processing System Including the Same, and Substrate Processing Method Using the Same,” describes a system that combines plasma and combustion processing to treat waste gas.
The scrubber includes a plasma processing unit with a plasma-generating device and a power-generating device, as well as a combustion processing unit with a combustor that forms a flame. A connection conduit supplies waste gas to the plasma-generating device, where the gas is used to form plasma. The plasma and combustion units provide separate reaction spaces: one for plasma and another for the flame. A back-end processing unit connects to the combustion unit.
Career Highlights
The information provided associates Heo with Samsung Electronics Ltd. and the Korea Institute of Machinery & Materials. His patent focuses on waste-gas treatment technology for substrate processing systems.
Collaborations
Mukyeong Kim and Hyun Seok Kim are identified as Heo’s coworkers.
Conclusion
Iljeong Heo’s listed invention combines plasma and combustion processes to treat waste gas, reflecting his work in substrate-processing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile