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Years Active: 2017-2019
Title: Ilgu Yun: Innovator in Optical Emission Spectroscopy
Introduction
Ilgu Yun is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of optical emission spectroscopy, holding a total of 3 patents. His work focuses on developing advanced technologies for analyzing plasma states, which are crucial in various industrial applications.
Latest Patents
One of Ilgu Yun's latest patents is an apparatus for optical emission spectroscopy. This innovative apparatus includes a light collection unit designed to gather light within a plasma process chamber, where plasma is generated to process substrates. The collected light is transmitted through a light transmission unit to an analysis unit, which analyzes the plasma state. The light collection unit is equipped with a part that concentrates the light generated in the plasma process chamber, enhancing the accuracy of the analysis.
Another notable patent involves a tube-type lens that is essential for accurately detecting plasma states during processes. This patent also includes an optical emission spectroscopy (OES) apparatus that utilizes the tube-type lens, a plasma monitoring system incorporating the OES apparatus, and a method for manufacturing semiconductor devices using this monitoring system. The tube-type lens features a cylindrical design with a first lens at the entrance that prevents light transmission in its central portion, and a second lens at the exit for light egress.
Career Highlights
Ilgu Yun has worked with prestigious organizations such as Yonsei University and Samsung Electronics. His experience in these institutions has allowed him to collaborate on various research projects and contribute to advancements in technology.
Collaborations
He has collaborated with notable colleagues, including In-Joong Kim and Sang Myung Lee, further enhancing his research and development efforts in the field of optical emission spectroscopy.
Conclusion
Ilgu Yun's innovative work in optical emission spectroscopy and his contributions to the field through his patents highlight his role as a significant inventor. His advancements are paving the way for improved technologies in plasma analysis and semiconductor manufacturing.