The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2018
Filed:
Aug. 10, 2016
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Industry-academic Cooperation Foundation, Yonsei University, Seoul, KR;
In-joong Kim, Seoul, KR;
Ilgu Yun, Seoul, KR;
Abstract
Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.